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Fluorinated Specialty Gases

Fluorinated Specialty Gases

Power insulating gas: Perfluoroisobutyronitrile (C4F7N) serves as a medium- and high-voltage power insulation gas, providing arc-quenching protection. While the conventional power insulation gas SF6 is a potent green house gas, C4F7N with a low GWP potential becomes an excellent alternative, typically used for insulation and protection in medium- and high-voltage transmission and distribution infrastructure. In commercial grid equipment, replacing SF6 with fluorinated special gas mixtures can reduce carbon emissions by 99%, significantly minimizing environmental impact.

Dry etching gas: Hexafluoroisobutylene (HFIB) is used as an etching gas for high aspect ratio integrated circuits, applicable in storage use in semiconductor industry  (e.g., DRAM, 3D NAND), and can also serve as an intermediate for synthesizing other materials to enhance performance.

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Product series